Deep research · Memory & semiconductor equipment

Global Memory Fab Expansion & Equipment Demand (2026-2028)

— From Maker Capex to the Tool-Level Transmission Map

About this piece: A structured read of the 2026-2028 memory build-out and the equipment it pulls, refreshed with this week's Korean investment-week deltas (verified 2026.6.26-7.3). Structure: makers → equipment overview → tool-by-tool → investment framework. Companion interactive map: memory-fab-map-en.pages.dev. Figures marked "model/est." are modeled, not official disclosure; two hard data conflicts are flagged "unverified" (see Appendix B).

How to read this

Three paths:

Confidence tags (one scheme, used throughout):

TagMeaningGood for
officialCompany announcement / filing / government documentConfirming a project exists, dollar amount, timing
reportedCredible industry reporting, cross-checkedCadence, order direction (cite carefully)
model / est.Modeled estimateJudging the direction of the supply slope, not precise forecasts
optionUnconfirmed far-dated option / hypothesisWatchlist only, not base case

On the equipment side, the analytical tiers map roughly as: proof-the-slope ≈ has official/reported revenue or order evidence; option-to-proof ≈ direction confirmed but no customer-share evidence; theme ≈ mechanism holds but no order evidence.

Four hard rules (every number passes these four gates):

  1. Backend packaging/test capacity is not added to front-end WPM (Cheonan/Onyang, P&T7, Indiana, Singapore AP carry no WPM);
  2. NAND→DRAM conversion is not counted as net-new cleanroom;
  3. Policy/roadshow ten-year headline numbers (2,655T, 896T, 600T) are not converted into 2026-28 WFE;
  4. Cleanroom area and satellite images are not reverse-engineered into WPM.

One-page conclusion

1. This is not an ordinary memory cycle. AI demand is repricing four bottlenecks at once: advanced DRAM/HBM front-end wafers, HBM backend conversion (sellable HBM), NAND's role in AI-inference storage, and national-scale fab infrastructure. A single dollar of capex flows in sequence through construction → cleanroom → tool move-in → qualification → supply, and each stage benefits a completely different set of suppliers.

2. The 2026 supply paradox is where the whole story starts. Headline capex is unprecedented (Korea alone announced ₩3,200T-scale roadshow numbers in a single week), yet 2026 global DRAM net add is only ~110-120k wpm — Samsung revised down to just ~15k (P4 ramp pushed to Q4, conversion not counted as net add, old lines exiting) [est.]. Layered onto HBM's 3-4× wafer consumption, commodity DRAM supply grows almost zero. The price surge (1Q26 contract +90-95%) and the equipment orders are two sides of one coin: supply can't be released, so the money keeps flowing into the chain that "makes expansion land."

3. The right read of this week's (6.26-7.3) Korean "national investment roadshow week": the big numbers (Samsung's 10-year 2,655T, Honam 896T MOU, SK 1,100T) are political pricing and don't enter the 2026-28 model; the real deltas are four: ① SK split Cheongju 100T for the first time into an 80T NAND fab M17 (ops 2027, output 2029H1) + 20T packaging — the first big anchor for a Korean NAND-WFE restart; ② Samsung's 56T into Cheonan/Onyang, with Onyang adding 5 HBM backend lines — an escalation of the HBM packaging arms race; ③ SK's ADR prospectus disclosed 11.9T of EUV purchases (through 2030) — a rare company-level EUV figure disclosed directly; ④ Yongin Fab1's first cleanroom pulled forward to 2027.2 — SK's front-end WFE order window a quarter earlier.

4. Rank equipment by "timing × bottleneck × evidence," not by total capex. In 2026-27, watch facilities/gases/cleanroom, HBM backend (bonding/test/inspection), and process control first; in 2027-28, watch front-end WFE moving in en masse (Yongin 2027.2 cleanroom, P4/P5, M17) and the NAND generation switch; only after 2028 do you calibrate the long-dated options (P5 full ramp, Yongin full config, Clay NY, CXMT Fab4).

5. The landscape in three lines: near-monopoly segments (ASML/KLA/DISCO/TEL Track/Lam HARC) deepen their moats in the AI era with a rising certainty premium; the platform player (AMAT) is structurally eroded by "narrow-and-deep" specialists (FY25 +4% vs WFE +15%); the HBM new categories (TCB→hybrid bonding) have the most elasticity but the least-settled landscape — the process-generation switch is the window where customer lock-in reshuffles. Domestic substitution scales at mature nodes (etch/deposition >40%, thermal >60%), while lithography (~18%) and metrology (~25%) are the hard ceiling.

6. The single most important discipline: capex ≠ WFE orders ≠ bit supply. Any project that sits two consecutive quarters at "construction / policy headline" with no cleanroom delivery, tool move-in, or customer-qualification evidence should be downgraded from near-term equipment beta to a long-dated option.


Chapter 1 — Makers: read the people, then the money, then the timing

1.0 This week's delta: Korea's "national investment roadshow week" (6.29-7.2) ★

Weekly delta: Korea "national investment roadshow week" (2026.6.29 - 7.2) Three official events -> a batch of 10-yr regional headline figures + a few genuinely trackable project increments. Core discipline: political headline numbers != 2026-28 equipment demand 6/29 (Mon) Blue House Two chairmen speak + fair disclosure SW 800T national project, 4 new fabs 6/30 (Tue) Gwangju MOU Honam region 896T signed (SS425+SK470+Amkor1) Samsung group 10-yr 2,655T domestic plan 7/2 (Thu) Chungcheong event Chungcheong ~392T (Samsung ~140T, SK ~100T) Two HBM packaging fabs land in Chungcheong Next week 7/6-7/10 SK ADR pricing/listing (Nasdaq: SKHY) Samsung: big regional headlines, project adds in HBM backend * Genuinely new figures (first disclosed this week) (1) Group 10-yr domestic invest 2,655T (semis 2,106T): capital region 1,650T / Honam 425T / Chungcheong 140T / Yeongnam 60T (6/30) (2) Of Chungcheong 140T: Samsung 56T into Cheonan+Onyang HBM base, Onyang adds 5 HBM backend lines (7/2) -> bonding/test/inspect tools benefit (3) Gwangju 2 memory fabs "effectively selected" (within Honam 425T) ◇ Window-edge increment (6/22-23) P5 Fab2 (last at Pyeongtaek) groundbreaking pulled ~6 months earlier, breaks ground ~Jul 2026, targeting 2029 operation; P5 single-fab invest >60T o No change this week (existing framing carried over) 2026 capex+R&D over 110T (group figure); P4 mass ramp in 2026Q4 (1c DRAM->HBM4); HBM4 in mass production since 2026.2, sold out for year; Yongin 360T/6 fabs maintained, "Yongin and Honam built in parallel" Do not misread: 2,655T is a 10-yr group figure (incl. non-semis), not convertible to 2026-28 memory WFE; Honam fab has no site/schedule detail SK hynix: biggest add this week -- Cheongju 100T split * Genuinely new figures (first disclosed this week) (1) Cheongju 100T split (7/2): 80T for new NAND fab M17 (start 2027, operational 2029H1) + 20T packaging fab (done end-2027) -> NAND WFE restart signal (2) Yongin Fab1 first cleanroom target 2027.5 -> 2027.2 pulled forward (6/26, triple-deck) (3) ADR offering (6/24): raises 45.45T, use includes 11.9T EUV purchases (through 2030) -> direct long-term order anchor for ASML; 7/10 Nasdaq listing ◇ 6/29 official baseline (framing set that week) 1,100T mid-long term: Yongin 600T (full lifecycle, officially "incl. equipment, extends beyond 2033"; 4th fab first cleanroom 2033, 12 yrs ahead of 2045) + Cheongju 100T + SW region 400T (2 fabs, site TBD) o No change this week (existing framing carried over) M15X: wafers started 2026.2 (1b DRAM->HBM4), 50k wpm by 2027; P&T7 broke ground 4/22; Indiana mass production 2028H2; HBM4E 12-hi sampled 6/18 Do not misread: 600T is a "full lifecycle through 2033+" figure; Fab1 approved build investment is only ~31T (9.4T + additional 21.6T) Ranked real impact on equipment demand (by verifiability) 1. SK M17 (80T NAND) -- start 2027 / operational 2029H1: first big anchor for "Korean NAND WFE restart", benefits deposition/HARC etch (Lam/TEL/AMAT) 2. Samsung Onyang 5 HBM lines + 56T -- confirms HBM backend arms race escalating: TCB/hybrid bond, thinning, probe card, ATE, inspection 2027-28 visibility rises 3. SK ADR 11.9T EUV purchases (to 2030) -- rare company-level EUV purchase figure directly disclosed, supports ASML memory order slope 4. Yongin Fab1 cleanroom pulled to 2027.2 -- cleanroom done = tool move-in: SK front-end WFE order window one quarter earlier than expected 5. Honam/SW 896T, 2,655T and other 10-yr figures -- only benefit land/power(6.3GW)/water(650kt/day)/EPC long-term pipeline for now, not in 2026-28 equipment model Illustrative; figures marked model/est. are not official disclosure. Chungcheong total has two figures (392T/310T), unverified pending reconciliation.

This week was a watershed for reading the Korean build-out: 6/29 Blue House briefing (two chairmen's speeches + same-day disclosures) → 6/30 Gwangju MOU + Samsung's 10-year plan → 7/2 Chungcheong-region announcement. Three events formally elevated Korean memory expansion from "corporate action" to "national project." But for equipment research you must separate political pricing from trackable deltas.

Full list of this week's new numbers (verified 2026.7.3)

DateActorNumberNatureEquipment read
6/29Korea govtSouthwest (Honam) 800T national semiconductor project; Samsung/SK each build 2 new memory fabsPolicy framing [official, 10-yr]Far-dated facilities pipeline only
6/29SK hynix1,100T mid/long plan: Yongin 600T (full lifecycle) + Cheongju 100T + Southwest 400T; 4th Yongin fab 2033 (12 yrs earlier than 2045)Official frameworkConfirms Yongin cadence; 600T explicitly "includes equipment, extends past 2033"
6/30Samsung+SK+AmkorHonam 896T MOU (Samsung 425 + SK 470 + Amkor 1); needs 6.3GW power, 650k tons water/daySigned [official, no site/timeline]Power/water/EPC far-dated pipeline; note 800T (govt) ≠ 896T (corporate) coexist
6/30Samsung group10-yr domestic investment 2,655T, of which semi 2,106T (metro 1,650 / Honam 425 / Chungcheong 140 / Yeongnam 60)Group plan [official, 10-yr]First regional split; not convertible to annual WFE
7/2SK hynixCheongju 100T split: 80T new NAND fab M17 (ops 2027, output 2029H1) + 20T packaging fab (done end-2027)Project-level new ★ [official]Most important this week: anchor for a Korean NAND-WFE restart; packaging 20T ≥ prior P&T7 ~19T
7/2SamsungOf Chungcheong 140T, 56T into Cheonan+Onyang HBM base; Onyang adds 5 HBM backend linesProject-level new ★ [official/reported]HBM bonding/test/inspection order visibility strengthens for 2027-28
6/24-26 (edge)SK hynixADR raise 45.45T (lists on Nasdaq 7/10 as SKHY): 45.5T new-capacity capex + 11.9T EUV purchases (to 2030); Yongin Fab1 first cleanroom 2027.5→2027.2Prospectus [official]Direct EUV figure (a far anchor for ASML); cleanroom pull-forward = tool move-in pull-forward
6/22-23 (edge)SamsungP5 Fab2 groundbreak prep pulled ~6 months forward (~2026.7), ops target 2029; >60T eachReportedP5 shifts from "frozen" to twin fabs in parallel

Core numbers unchanged this week (to prevent misreading as new): Samsung 2026 capex+R&D >110T (disclosed 3/19, group-level); P4 mass ramp in 2026Q4; HBM4 in mass production since 2026.2 and sold out for the year; SK M15X wafers in since 2026.2; Indiana and HBM4/4E customer shares saw no new numbers.

The call: where political pricing ends and real deltas begin

The 6.29-week ₩3,200T-scale aggregate (implied real semi increment estimated ~₩1,300-1,700T) is a cross-period, cross-division combined figure; its signal value is in directional discipline (speeches + same-day formal disclosure, lowering the "just talk" risk), not the dollar amount. Ranked by verifiability, the items that actually move 2026-28 equipment demand:

  1. M17 (80T NAND) — positive for the deposition/HARC-etch chain (Lam/TEL/AMAT); 2027 groundbreak means tool move-in from 2028;
  2. Onyang 5 HBM lines + 56T — more direct buyers of TCB/hybrid bonding, thinning, probe cards, ATE, inspection;
  3. SK 11.9T EUV purchase — company-level evidence supporting ASML's memory order slope;
  4. Yongin Fab1 cleanroom 2027.2 — cleanroom completion = tool move-in; 2027 becomes SK's big front-end WFE order year;
  5. Honam/Southwest ten-year framings — for now, facilities far-dated pipeline only.

1.1 The geography: read the world in three tiers

Global Memory Capacity Map (2026-2030 expansion projects) Color = company · ● front-end fab · ■ backend packaging & test · ◌ dashed = far-dated/undecided · illustrative, positions approximate Samsung SK hynix Micron Kioxia/SanDisk CXMT YMTC N. America China Japan India Boise ID1/ID2 Micron US DRAM/HBM front-end ID1 first wafer mid-2027 Clay NY mega-fab CHIPS-backed · 2030+ option Indiana (SK) HBM packaging $3.87B · 2028H2 Manassas VA (mature DRAM) Xi'an — Samsung NAND anchor Hefei CXMT DDR5/HBM3 · model 350→500k WPM Wuhan YMTC Phase 3 + 2 new fabs · domestic tools >50% Dalian (SK) Wuxi (SK DRAM) Korea ★ Korea corridor — expansion hub Samsung: Pyeongtaek + Yongin 360T + backend SK: Cheongju M15X/P&T7 + Yongin 600T + Icheon → see the Korea corridor zoom (next figure) Kitakami K2 BiCS8/10 · ramps 2026H1 Yokkaichi World's largest NAND base Hiroshima (Micron ~$9.6B) Tongluo P5 (Taiwan) meaningful shipments mid-2027 · brownfield + EUV-ready Singapore (Micron dual engine) HBM AP ~$7B: ops 2026 / ramp 2027H1 Fab 10B NAND ~$24B (10yr): wafers out 2028H2 Gujarat (Micron ATP) The global map at a glance: three tiers Near-term supply (2026-27 equipment-order mainstay): Pyeongtaek P4 · Cheongju M15X · Kitakami K2 · Tongluo P5 · Singapore HBM AP · Hefei/Wuhan (domestic chain) Mid-term supply (2027-28 tool move-in): Pyeongtaek P5 · Boise ID1/ID2 · P&T7 · Indiana · Fab 10B · BiCS10 conversion Long-dated options (2028+, facilities first): Yongin twin clusters (Samsung 360T + SK 600T) · Clay NY · Southwest hub (896T policy framing) · CXMT Fab4 Rule: the further right (more far-dated) a project, the more its current beneficiaries skew to construction/power/gas/cleanroom; equipment (WFE) orders lag groundbreaking by 18-30 months. Illustrative; positions approximate; model/est. figures are not official disclosure.

Read the global map in three tiers by when supply lands: near-term supply (2026-27 equipment orders: Pyeongtaek P4, Cheongju M15X, Kitakami K2, Tongluo P5, Singapore HBM AP, Hefei/Wuhan); mid-term supply (2027-28 tool move-in: Pyeongtaek P5, Boise, P&T7, Indiana, Fab 10B, M17); long-dated options (2028+, facilities first: the two Yongin clusters, Clay NY, Honam/Southwest hub, CXMT Fab4). The more far-dated the project, the more the current beneficiary skews to construction/power/gas/cleanroom.

Korea "Memory Corridor": the world's largest single memory buildout, within 100 km south of Seoul Left: Korea locator Right: Gyeonggi-Chungcheong corridor zoom (■ Samsung ● SK hynix; solid=under construction/production, dashed circle=far-dated plan) Illustrative map, boundaries approximate Korea (illustrative) Memory corridor (zoom at right) Seoul Gwangju/Honam Southwest "second semi hub" Policy framing ~KRW 896T (2030+) Busan Yellow Sea coast Seoul (50-100km south = the corridor) Hwaseong/Giheung Samsung installed home base (S1/S3/S4) Adv. DRAM/HBM front-end + EUV learning curve Pyeongtaek ★core of Samsung's supply slope P1-P3 installed · P2 NAND→DRAM converting P4: 2026H2 first tools → 2027-28 ramp (1c DRAM/HBM) P5: ~KRW 60T, restarted early 2026.6 → ops 2028+ Yongin·Namsa (Samsung national industrial park) 6 fabs · total investment framing ~KRW 360T First fab breaks ground end-2026 → 2030+ long-dated option Yongin·Wonsam (SK semi cluster) 4 fabs · lifecycle framing ~KRW 600T Fab1 ~KRW 9.4T: completion target 2027.5 Largest greenfield wafer option of next decade Icheon SK HQ · M10/M14/M16 installed HBM front-end mainstay (node migration, not new shell) Cheonan/Onyang Samsung HBM backend (packaging/test) catch-up battleground Adds no WPM, decides sellable-HBM conversion Cheongju ★core of SK's near-term increment M15X: ~KRW 5.3T build / 20T+ total investment Production pulled to 2026.5 (was end-2026) · 1b DRAM/HBM4 P&T7: HBM packaging & test, target end-2027 · M15 NAND installed ≈ 30 km Corridor logic: shared talent/supply chain/power → clustered expansion; the two Yongin clusters are the "second Pyeongtaek" after 2030 Geography → investment implications: ① Pyeongtaek/Cheongju = 2026-28 near-term equipment orders (front-end WFE + backend packaging & test); ② Yongin twin clusters = from 2027, first pull construction/power/gas/cleanroom (facilities lead by 18-30 months), WFE later; ③ Cheonan-Onyang/P&T7 = most direct buyers of HBM backend tools (bonding/test/inspection). Illustrative; positions approximate; model/est. figures are not official disclosure.

The key geographic fact for Korea: within 100 km south of Seoul sits the single largest memory expansion in the world. Pyeongtaek (Samsung P1-P5) and Cheongju (SK M15/M15X/P&T7/M17) are the 2026-28 near-term battleground; the two Yongin clusters (Samsung 360T + SK 600T framing) are the "second Pyeongtaek," pulling facilities first from 2027; Cheonan/Onyang (Samsung) and Cheongju P&T (SK) carry the HBM backend; the Gwangju/Jeonnam Southwest hub is a 2030+ policy option.

1.2 Samsung: catch-up + conversion + backend relief

One-line read: Samsung's problem isn't money — it's connecting Pyeongtaek's wafers, conversion's product mix, and Cheonan/Onyang's backend in the same time window — largest capex ≠ fastest sellable HBM.

ProjectTiming readSupply/equipment readEvidence
P2/P1 NAND→DRAM conversion2026-2027Reuses cleanroom, DRAM feedstock↑ NAND↓; pulls retooling/clean/metrologymodel (40→70k)
P42026Q4 mass ramp (was expected Q2-3, revised down) → full 20281c DRAM/HBM4 front-end; Ph2/Ph4 tool POs placedproject reported, WPM est. (15→100k); capex ~₩6-8T
P5 Fab1/Fab2Fab1 ops 2028; Fab2 groundbreak pulled to ~2026.7, ops 2029>60T each; triple-deck fab; facilities first, WFE 2027+reported/est.; "P5 capacity 6k vs 60k wpm" unverified (App. B)
Cheonan/Onyang HBM backendCheonan packaging done 2027.12; Onyang +5 lines (7/2 new); Chungcheong 56T totalAdds no WPM; decides sellable HBM; Cheonan end-2026 target TCB 231k/mo + HCB 19.5k/moofficial/reported
Xi'an NANDStable ~170k installedSupports the network elasticity of Korea's NAND→DRAM conversionest.
Yongin (360T/6 fabs) / Gwangju (2 fabs in the 425T Honam figure)First fab groundbreak end-2026 / "effectively selected"2030+ option; facilities firstoption for WPM

Equipment read: Samsung's money splits into three chains — Pyeongtaek front-end WFE (litho/etch/deposition/CMP/metrology across the board); conversion retooling (the focus is process control, not whole new lines); Cheonan/Onyang backend (bonding/thinning/probe/ATE/inspection, mostly in-house via SEMES but the outsourcing ratio is the key track). The chairman this week defined the HBM plant as a "main-fab-grade" process flow — the first time management elevated packaging to front-end-grade capex intensity, direct evidence for re-rating backend equipment intensity.

Falsifiers: P4/P5 tool move-in slower than the model → front-end slope cut; 1c yield (currently ~70%, pushing 80%) or HBM4 customer qualification short → front-end expansion can't turn into sellable HBM; Cheonan/Onyang tools and qualification out of sync → catch-up stays capped by the backend.

Samsung fab-by-fab model table (modeled, kWPM — click to open)
Fab2026E2027E2028E2029E2030ELongNote
Giheung S18075706560~0old line shrinking
Hwaseong S3230230235235235230DRAM/HBM3E front-end mainstay
Hwaseong S4606060606060EUV line
Pyeongtaek P1 DRAM125125125125125120mixed line
Pyeongtaek P2 conversion406570707070NAND→DRAM
Pyeongtaek P3 DRAM145150150150150150HBM3E mainstay
P41560801001001001c/HBM4
P5NDND30801201502028+ deck by deck
Yongin Fab1NDNDND1530200option
DRAM total6957658209009501,080+note the gap vs a "720k today" reading (App. B)
NAND total430380340300270~250-160k over 5 yrs, strategic shrink

1.3 SK hynix: integrated HBM system expansion

One-line read: SK is not a single-point expansion — it strings M15X (near-term front-end) → Yongin (long-term greenfield) → P&T7/Indiana (backend) → M17 (NAND restart) into a complete HBM/storage system chain — the most complete evidence chain of the five.

ProjectTiming readSupply/equipment readEvidence
Icheon M10/M14/M16Installed ~345k (est.), node migrationHBM4/4E migration = EUV layer/metrology intensity, not new shellsreported/est.
Cheongju M15XWafers in 2026.2 (4 months early); reaches 50k wpm in 20271b DRAM→HBM4; the most direct near-term WFE addproject official (5.3T build / 20T+ total), WPM est. (10→80k)
Yongin Fab1First cleanroom 2027.2 (early) → initial output 2027H2 → full config 2030H1Approved construction ~31T (9.4+21.6); 6 cleanrooms one per 6 months, full ~360k; facilities 2026-27, WFE from 2027project official, WPM est.
Yongin Fab2-44th fab first cleanroom 2033 (12 yrs early)600T is full-lifecycle framing (officially includes equipment)framework official, WPM option
Cheongju P&T7Broke ground 4/22; WT line 2027.10, WLP line 2028.2 rampLargest single HBM packaging spend (~19-20T); MR-MUF/TCB home turfofficial/reported
Cheongju M17 NAND ★Ops 2027, output 2029H1 (7/2 new)80T; first anchor for the Korean NAND-WFE restartofficial
Indiana APMass production 2028H2$3.87B + $458M grant; US customer ties; no WPMofficial
Wuxi/DalianSustainingMigration/maintenance only under export controlsreported/est.

Equipment read: M15X is the most front-end-heavy (ASML/TEL/Lam/AMAT/KLA/SCREEN); Yongin in 2026-27 is EPC/power/gas/UPW/AMHS (SK ecoplant as GC), entering the WFE window after the 2027.2 cleanroom delivery — the 11.9T EUV purchase plan in the ADR prospectus (to 2030) effectively "pre-announces" the lithography leg of this chain; P&T7/Indiana pull Hanmi/ASMPT/DISCO/Advantest/FormFactor/Onto/Camtek; M17 is the new NAND deposition/HARC-etch order pool from 2028.

Falsifiers: M15X ramp or HBM4 qualification slow → near-term add cut; Yongin cleanroom cadence (one per 6 months) missed → pre-2030 slope cut and the facilities→WFE lag lengthens; P&T7/Indiana qualification delayed → front-end die stuck at sellable conversion; if M17 slows on a NAND price fall → the NAND-WFE restart is falsified.

SK fab-by-fab model table (modeled, kWPM — click to open)
Fab2026E2027E2028E2029E2030ELongNote
Icheon M10454545454540legacy
Icheon M14120125125125125120HBM front-end
Icheon M16180185185185185180largest installed base
Cheongju M8353535353530old line
M15 DRAM portion252525252525M15 body mostly NAND
Wuxi190195195195195190control-constrained
M15X104060808080near-term add
Yongin Fab1ND3080150200280est./option
Yongin Fab2-4NDNDND30100830-990option
DRAM total6056807508709901,775-1,9352030E matches the "1M wpm" ambition
NAND total285280275270265~250layer upgrade only until M17

1.4 Micron: milestone-based capex story

One-line read: Micron deliberately discloses no fab-level WPM — the right read is to track milestones (first wafer / meaningful shipments / AP capacity) and the shape of the money (construction vs equipment, customer prepayments).

SiteTypeAmountMilestoneEquipment read
Boise ID1/ID2US leading-edge DRAM/HBM front-endnot broken outID1 first wafer mid-2027; ID2 first wafer late 2028EUV (multi-year ASML deal signed) + full WFE
Tongluo P5 (Taiwan)brownfield front-endacquired $1.8B + expansionmeaningful shipments mid-2027 (pulled forward); 2nd cleanroom +270k sq ftfastest decision→order DRAM elasticity
Singapore HBM APHBM backend~$7B (through decade)ops 2026, ramps 2027H1TCB/bonding/test/inspection buyer
Singapore Fab 10BNAND front-end~$24B/10yroutput 2028H2; final cleanroom 700k sq ft2028+ NAND deposition/etch
Hiroshimanode migrationnot broken outnext node volume production 2027H2 (1-gamma→1-delta, EUV adoption)migration-type WFE
Clay NY / Manassas / Gujarat2030+ megafab / long-lifecycle / conventional teststate up to $5.5B / $275M grant / ~$2.75B total2030+ / 1-alpha qual end-2026 / already in productionoption & resilience buckets, not the HBM line

Falsifiers: prepayments can't convert to tool install / customers renegotiate → the capex demand anchor weakens; any critical path of Tongluo/ID1/Singapore AP delayed → 2027-28 supply timing slips; backend bottleneck (stacking/test/probe/substrate) exceeds front-end improvement → HBM revenue converts slower than capex.

1.5 SanDisk/Kioxia: physical network + JV economics

One-line read: SanDisk and Kioxia are not two separate capacities — Yokkaichi/Kitakami are the physical anchor, the JV is the economic allocation mechanism (the JV covers ~80% of Kioxia's manufacturing, each takes ~50% of output, SanDisk bears 49.9-50% of capital obligations). Summing the two double-counts.

Equipment read: NAND's equipment elasticity is not in lithography but in deposition (+50% steps by layers), HARC etch, clean/CMP, metrology, CBA bonding; K2/BiCS10 are "cleanroom reuse + straight to tools" conversion demand — the fastest cadence. Falsifiers: NAND ASP falls fast in 2026H2 → 470B capex reads as aggressive supply and the SanDisk elasticity is falsified; Gen10/CBA qualification slow → the technology premium compresses.

1.6 CXMT/YMTC: domestic supply response + domestic-tool proving window

One-line read: CXMT is a counter-variable on the commodity-DRAM supply curve and a proving window for domestic tools — not a near-term global HBM fix; YMTC is the same for NAND.

Equipment read: the main order pool for domestic tools (NAURA/AMEC/Piotech/Hwatsing/ACM); the control exposure for overseas tools (Lam China revenue ~35%, KLA China -9%). Falsifiers: any of DDR5 server qualification, yield, or HBM backend capability short → supply response cut; controls escalate (the MATCH act already bars immersion DUV and cryo etch to China) → expansion forced to slow.

1.7 Summary: timeline and capacity bridge

Global Memory Fab Expansion Timeline (2026-2030) Light dashed = construction/cleanroom phase (facilities chain) Solid = tool install/mass production (WFE/backend) ◆ = key milestone 2026 2027 2028 2029 2030+ Samsung Pyeongtaek P4 (1c/HBM4 front-end) 2026Q4 mass ramp est. 15→100k wpm Pyeongtaek P5 Fab1/Fab2 Fab2 groundbreak ~2026.7 (6 mo early) ◆Fab1 online 2028 / Fab2 2029 Pyeongtaek P2 NAND→DRAM conversion reuse cleanroom: 40→70k (est.) Cheonan/Onyang HBM backend ★56T Cheonan packaging done 2027.12; Onyang +5 lines (newly added) Yongin Samsung Nat'l Industrial Park 1st fab groundbreak end-2026 → 2030+ supply option (360T basis) SK hynix Cheongju M15X (1b/HBM4 front-end) 2026.2 wafer start (4 mo early) → 50k wpm by 2027 Yongin Fab1 (greenfield) 1st cleanroom 2027.2 (early) → 6 cleanrooms every 6 mo, full ramp ~360k (B/C) Cheongju P&T7 (HBM test/pkg) WT 2027.10 / WLP 2028.2 Cheongju M17 (new NAND fab) ★80T Newly added: 2027 start → 2029H1 online Indiana USA (HBM AP) 2028H2 mass production ($3.87B + CHIPS) Micron Tongluo P5 (DRAM/HBM front-end) meaningful shipments mid-2027 (pulled forward) Boise ID1 / ID2 ID1 first wafer mid-2027 ID2 first wafer end-2028 Singapore HBM AP (backend) 2026 online → 2027H1 ramp (~$7B) Singapore Fab 10B (NAND) 2028H2 first wafer (~$24B/10yr) Clay NY mega-fab 2030+ supply Kioxia/SanDisk Kitakami K2 / BiCS10 conversion K2 ramp 2026H1 BiCS10 (332-layer) mass production 2026H2 CXMT Hefei Fab3 150→200k + HBM3 end-2026 (est.) Key read: 2026 = dense near-term line starts (P4/M15X/K2/Tongluo); 2027 = big cleanroom-delivery year (Yongin 2027.2, P&T7, Cheonan) → tool move-in window; 2028 = backend capacity realization (Indiana, P5, 10B); the longer the dashed bar, the more it is a facilities story (construction/gas/power) than a WFE story. Illustrative; figures marked model/est. are not official disclosure.
DRAM Capacity Bridge 2026E→2030E (model, k wpm) ⚠ All figures are model est. (not company disclosure); use to gauge supply-slope direction, not for precise forecasts 1,000 750 500 250 0 695 605 350 2026E 3-maker total 1,650 765 680 400 2027E 1,845 820 750 500 2028E 2,070 900 870 550 2029E 2,320 950 990 600 2030E 2,540 Samsung (P2 conv + P4 + P5) SK hynix (M15X + Yongin Fab1-4) CXMT (Fab3 + potential Fab4; Fab4 is a D-tier assumption) Micron ~385k (reference; no fab-level WPM disclosed) Three key takeaways ① 2026 global net add only ~110-120k (Samsung cut sharply to ~15k: P4 slips to Q4, conversion not counted as net add, old lines retire) → plus HBM 3-4x wafer draw, commodity DRAM supply grows ~zero — the supply-side root of price hikes ② 2027-2030 slope driven mainly by P4 ramp + Yongin Fab1 + CXMT Fab3/4; ③ SK 2030E 990k matches Choi Tae-won's "1M wpm" target — a model self-consistency check Illustrative; figures marked model/est. are not official disclosure. 3-maker total = Samsung+SK+CXMT. Long-term (~2033): Samsung 1,080+, SK 1,775-1,935, total 3,555-3,715k.

Evidence-strength contrast across the five (the easiest mistake in integration is putting all five in one precision table):

CompanyStrongest evidenceWeakest linkRight variable to track
SamsungStrategic direction + Pyeongtaek project existenceFab-level WPM all modeled; group capex not splitP4/P5 tool move-in, 1c yield, Cheonan/Onyang orders
SK hynixMost complete project + dollars + timing (M15X/Yongin/P&T7/M17/Indiana)Yongin far WPM is area-derivedCleanroom delivery cadence, EUV allocation, P&T7 tool buys
MicronCapex shape + milestones + prepaymentsDeliberately no WPMFirst wafer/shipments landing, prepayment→tool-install conversion
SanDisk/KioxiaJV structure + capex disciplineNo fab-level capacity disclosureK2 output, BiCS10 qualification, supply-agreement signings
CXMTProject existence (IPO prospectus)WPM/yield/customers all modeledDDR5 qualification, per-fab evidence, domestic-tool wins

Global figures (est.): global DRAM ~2,050k wpm today, 2026 net add only ~110-120k; Samsung+SK+CXMT 2026E 1,650k → 2030E 2,540k (+890k). Global NAND ~890-930k, Korean makers shrinking (Samsung -160k over 5 yrs), Japanese makers scaling layers, YMTC expanding — NAND is this cycle's strategic sacrifice, positive for ASP mid-term; M17/Fab 10B are the new WFE only from 2027.


Chapter 2 — Equipment overview: from capex to tools

2.1 Core framework: one dollar, four destinations, 18-30 months apart

From capex to equipment orders: one pool of money, four paths, 18-30 months apart The most important chart in the report: to judge any "X trillion investment" headline, first ask which chain and which stage it sits in Maker capex (classify first, then judge) Three colors of money: (1) Policy/roadshow figures (2,655T, 896T, 600T) -> 10-yr scale, not in model (2) Approved project invest (M15X 5.3T, Fab1 31T, M17 80T, P&T7 ~20T) -> schedulable (3) Annual executed capex (Samsung 110T group fig, SK ~50T, Micron $27B) -> lands in-year, 4 chains New funding anchors (week): SK ADR raises 45.45T (incl. 11.9T EUV purchases) Micron SCA customer prepay ~$22B ($18B cash) Policy subsidy: CHIPS/AMIC/ Korea nat'l ind. park/Japan METI Chain (1) Civil / cleanroom / utilities (greenfield first wave) Land grading -> shell -> cleanroom -> power/water/gas/chemicals/AMHS Examples: Yongin dual cluster, P5, Clay NY, Honam/SW new clusters, Fab 10B Beneficiaries: EPC (Exyte/SK ecoplant/Samsung C&T), gas (Linde/AL/AP), UPW (Kurita/Organo/Nomura), power (ABB/Schneider), AMHS (Daifuku/Murata) Revenue recognition timing After start: 6-12 months Micron FY27 capex increment over half is construction -- direct evidence civil leads Chain (2) Front-end WFE (tools enter only after cleanroom ready) tool move-in -> commissioning -> pilot wafer -> yield ramp -> mass ramp Examples: P4 (Q4'26 ramp), M15X (wafers in), Tongluo, Boise, Yongin Fab1 (from 2027.2) Beneficiaries: ASML (EUV), TEL (Track/etch), Lam (etch/dep), AMAT, KLA (metrology), SCREEN (clean), ASMI/Kokusai, Ebara Lag from start 18-30 months Cleanroom done = tool move-in window opens (Yongin 2027.2 -> 2027 is SK's big WFE order year) Chain (3) HBM backend P&T (no WPM add, sets sellable HBM) TSV -> thinning/dicing -> KGD test -> TCB stacking -> package -> final test -> customer qual Examples: Cheonan/Onyang (+5 lines, 56T), P&T7 (~20T), Indiana, Micron Singapore AP Beneficiaries: Hanmi/ASMPT/BESI/SEMES (bonding), DISCO (thinning), Advantest/Teradyne, FormFactor (probe card), Onto/Camtek (inspection) Order window 2026-2028 All 3 packaging fabs come online end-2027 to 2028 -> HBM supply gap persists at least to 2028 Chain (4) Conversion / NAND generation upgrade (equipment demand, no new shell) P2 NAND->DRAM retooling, BiCS8->BiCS10 (332 layers), K2 space conversion, M17 (80T new fab) Feature: cleanroom reuse -> skip civil, straight to tools; "equipment intensity per GB" rises with layers Beneficiaries: Lam (HARC/Cryo/Mo-ALD), TEL (cryo etch), AMAT, SCREEN/Ebara, KLA/Nova, bonding (CBA) Fastest cadence 6-18 months brownfield/conversion fastest from decision to order (Tongluo, K2 are 2026-27 equipment upside leaders) Check chain (four steps to judge any expansion headline): spend type (which chain) -> equipment chain (who is pulled) -> proof source (any order/move-in evidence) -> falsifier (what would void the call) Mechanism != evidence: a valid chain does not mean a confirmed order. A project stuck two straight quarters at "civil/policy headline" with no cleanroom/tool move-in/qual signal should be downgraded to a long-dated option. Illustrative; figures marked model/est. are not official disclosure. Timing params: facilities recognize revenue 6-12 months after start, WFE peak lags start by 18-30 months.

This is the single most important figure in the report. The four-step check chain for any "XX-trillion investment" headline: spend type (which chain) → equipment chain (pulls whom) → proof source (any order/move-in evidence) → falsifier (when to void the call).

Four transmission principles:

  1. Judge project type first, then the tool. For greenfield (Yongin/P5/Clay NY) the first beneficiary is not ASML but EPC/gas/power/UPW — facilities lead WFE by 18-30 months. Yongin's real-world evidence (147,000 m² cleanroom, 2,312m utility tunnel, 345kV power) is this chain happening now.
  2. Conversion/brownfield is fastest. P2 conversion, Tongluo P5, K2/BiCS10 skip construction and go straight to tools — the main 2026-27 equipment elasticity.
  3. The real HBM bottleneck is usually backend. All three packaging fabs (Cheonan 2027.12, P&T7 end-2027, Indiana 2028H2) come online after end-2027 → the HBM supply-demand gap lasts at least to 2028, and the backend order window is exactly 2026-2028.
  4. NAND equipment beta doesn't follow DRAM's EUV logic. NAND uses no EUV today; the elasticity is in deposition/HARC etch/clean/metrology.

2.2 Five equipment demand-pull lines

Five demand-pull lines: different expansion types pull entirely different tools Demand delta = WPM delta x per-wafer tool-process density x yield-adjust factor; one project can trigger several lines (M15X 3-line stack = 3-5x the tool demand of a single-line project) Pull line Physical driver (why) Example projects Key beneficiary tools Timing (1) DRAM front-end (incl. node migration) 1c node lifts EUV to 5-7 layers; 4F2/VG architecture raises litho/etch intensity; HKMG adoption pulls deposition Samsung P4/P2 conversion SK M15X/Yongin Micron Boise/Taichung ASML.TEL.Lam.AMAT. KLA.SCREEN full line (highest litho-intensity track) 2026-27 Ongoing (2) HBM front-end (= advanced DRAM + TSV) 4x wafer-consumption multiplier (large die + TSV area + stacking yield loss); TSV adds 15+ sub-steps; process-control intensity doubles Same as left (HBM-dedicated share) 2026 AI absorbs ~20% of global DRAM-equivalent wafer capacity Added on top of (1): DRIE etch. plating.CMP.metrology/inspection (Onto $240M HBM agreement) 2026-27 Strongest (3) HBM backend packaging/test (tightest bottleneck) Layers scale nonlinearly: 12-16-20; bonder count proportional to layers; test time +30-50%; KGD test passes double with layers Cheonan/Onyang (+5 lines) . P&T7 Indiana . Micron Singapore AP Packaging elevated to "main-fab grade" TCB(Hanmi/ASMPT/BESI). DISCO.FormFactor. Advantest.Onto 2025-27 Already surging (4) NAND layer scaling + AI storage 218-332 layers: deposition steps +50%; HARC etch superlinear from ARDE effect; W-Mo material transition; CBA bonding architecture K2/BiCS10 . M17 (80T, new) Fab 10B . YMTC phase 3 (2025 NAND tools +45%) Lam(Cryo/ALTUS Halo). TEL.AMAT.SCREEN. bonding/CBA tools 2026-28 Restarting (5) Greenfield new build (timing arbitrage) 3-5 yr build cycle: shell 12-18 mo -> cleanroom 9-12 mo -> tool install 12-15 mo -> ramp 6-12 mo; facilities lead 18-30 mo Yongin twin cluster . P5 . Clay NY Hunan/Southwest hub (896T basis) 6.3GW power . 650k tons water/day Exyte.SK ecoplant.Samsung C&T. Linde.Air Liquide.Kurita. ABB/Schneider.Daifuku 2026-28 Leads Illustrative; model/est. figures are not official disclosure.

Demand increment = WPM increment × per-wafer tool-process intensity × yield adjustment. Multiplier effect: a project that triggers several lines at once (M15X = DRAM front-end + HBM front-end + HBM backend feedstock) can reach 3-5× the equipment demand of a single-line project; every 10k HBM wpm pulls the front-end ≈ 40k standard-DRAM wpm.

2.3 Market totals: the anchor and structural divergence

Segment2025 size2025 growthStructural read
WFE total$115.7B+11.0%baseline
of which DRAM tools$22.5B+15.4%EUV layers + HBM front-end intensity
of which NAND tools$14.0B+45.4%low base + layer-conversion restart, fastest segment
Backend test$11.2B+48.1%direct map of HBM test time +30-50%
Packaging$6.0B+19.6%TCB/bonding new-category pull
All equipment (2027E)$156Brecord highindustry forecast

Three structural reads: ① backend (+48%) > NAND (+45%) > packaging (+20%) > DRAM (+15%) > WFE average (+11%) — the growth gap is the market's validation of the "five pull lines"; ② in a memory line, equipment is 70-80% of total investment, of which etch + deposition is roughly half (est., for rough sizing); ③ in 2026 AI (HBM/GDDR7) consumes nearly 20% of global DRAM-equivalent wafer capacity — front-end intensity and the backend bottleneck rise together.

2.4 Equipment-segment navigation table

Equipment positioning map: moat depth x this-cycle pull intensity x (bubble = market size) Y-axis = catch-up barrier (yrs); X-axis = this-cycle memory-expansion pull intensity (qualitative, from 2025 segment growth + order evidence); color = competitiveness type -> This-cycle pull intensity (weak -> strong) ^ Catch-up barrier (2-3 yrs -> 12 yrs+) 12 yrs+ 8-10 yrs 3-5 yrs 2-3 yrs Golden quadrant: high moat x strong pull EUV litho ASML 100% Track TEL ~90% Metrology/insp. KLA ~63% . Onto Thin/dice DISCO >70% HARC/deep-Si etch Lam Cryo leads ATE test Advantest/Teradyne Probe card FormFactor Deposition CVD/ALD/PVD AMAT.Lam.TEL.ASMI General etch Lam.TEL.AMAT CMP AMAT.Ebara Clean SCREEN.TEL TCB 3x in 3 yrs -> $1.6B Hybrid bond 2027-28 ramp Facilities EPC.gas.UPW.power Domestic sub. NAURA.AMEC... Tech monopoly (8-12 yr moat . anchor) Customer-locked/oligopoly (3-5 yr . standard) HBM new category (unsettled . highest elasticity) Facilities (timing logic) China domestic (thematic) Positioning anchors (2025 actual growth): Backend test +48.1% . NAND tools +45.4% Packaging +19.6% . DRAM tools +15.4% WFE overall +11.0% FormFactor DRAM probe card +70% YoY DISCO record shipments . ASML EUV backlog EUR 25B+ Reading it: top-right (EUV/metrology/HARC etch) highest certainty but fully priced; bottom-right (TCB/ATE/probe card/hybrid bond) highest elasticity but reshuffled by process-generation shifts; bottom-left (facilities/domestic) not about moat but cadence -- facilities earn the timing spread, domestic earns on policy and qualification progress. Illustrative; model/est. figures are not official disclosure.
SegmentTAM (approx)Leader (approx share)Moat type / yearsPull lineProof tier
EUV/DUV lithography$25B+ASML (EUV 100%)tech monopoly / 12 yr+①②proof-the-slope
Track (coat/develop)$5-6BTEL (~90%)ecosystem lock / 8-10 yr①②proof-the-slope
Etch (incl. HARC/TSV)$18-20BLam lead, TEL, AMATtech+recipe / 8-10 yr (HARC)①②④proof-the-slope
Deposition CVD/ALD/PVD$25-28BAMAT, Lam, TEL, ASMI (ALD mid-50s%)oligopoly / 3-5 yr①④proof-the-slope
CMP~$4.1BAMAT ~65%, Ebara ~25%qualification lock 18-24 mo①②option-to-proof
Clean / thermalSCREEN, TEL; thermal domestic >60%oligopoly / 3-5 yr①④option-to-proof
Metrology / inspection$18B+KLA ~63%, Onto (HBM breakthrough)data flywheel / 10 yr+①②③proof-the-slope (Onto has direct order proof)
Thinning / dicing$2-3BDISCO >70%tool+consumable+service / 8-10 yroption-to-proof
Bonding TCB/hybrid$0.76B→$1.6B (26E)Hanmi/ASMPT/BESI/SEMESco-development lock / 3-5 yroption-to-proof (no customer-share evidence)
Probe card~$2.4BFormFactorinstalled-base interface / 3-5 yrproof-the-slope (revenue evidence)
ATE test~$9.2BAdvantest ~50-66% (by measure), Teradynesoftware lock / 3-5 yrproof-the-slope
Facilities (EPC/gas/UPW/power/AMHS)EPC $47B etcExyte/Linde/AL/Kurita/ABB/Daifukuproject lockoption-to-proof (some project proof)
Domestic substitutionNAURA/AMEC/Piotech/ACM/Hwatsingpolicy + validation①④ (China)theme
Note: shares are approximate and most cannot be supported to single-digit precision by primary sources; kept for framework use, to be sourced case-by-case in single-name work.

2.5 Three-tier beta and the allocation summary

Three-Tier Equipment Moat Pyramid × Positioning Framework Deeper moat = higher certainty, lower elasticity; size the book by evidence grade, not by story size Tech Monopoly Catch-up barrier 8-12 yrs+ Customer-Locked Qualification/software/installed base/co-dev lock · 3-5 yrs Risk: lock resets at process-generation transitions Platform Portfolio breadth × process synergy · 2-3 yrs In the AI era, "narrow & deep" specialists erode it (AMAT FY25 +4% vs WFE +15%) Tier 1 names · anchor holding ASML (EUV 100%) · KLA (data flywheel) DISCO (TAIKO + consumables lock) · Lam (Cryo) TEL (Track ecosystem) Gross margin 52-70% · AI-era premium rising No material structural break risk 2026-28 Tier 2 names · standard weight + elasticity overweight Advantest/Teradyne (software lock) FormFactor (installed base) · Hanmi (MR-MUF) ASMPT · BESI · TEL/AMAT fortress lines Key watch: TCB→hybrid bonding switch, W→Mo, microbump→copper and other gen points Tier 3 names · underweight (don't sell out) AMAT (PVD>50%/CMP~65% fortress holds, etch/implant eroded) · ASMPT platform lines Still holds portfolio edge at mature nodes; watch if GAA/backside power rebuilds qual lock Two opportunities outside the pyramid ① HBM New Category (max elasticity) TCB 3x in 3 yrs; hybrid bonding ramps 2027-28; structure unsettled = risk and elasticity share a root ② Facilities (timing arbitrage) Revenue confirmed 6-12 months after groundbreaking; Exyte/Linde/SK ecoplant/Samsung C&T; Yongin/Hunan/Southwest = multi-year pipeline China Domestic Substitution · thematic Adoption basis 35% (2025 new capacity); penetration basis 23.2% (installed base) Fast: thermal >60% · etch/deposition >40% Mid: CMP (Hwatsing) · clean (ACM ~8% global) Slow: metrology ~25% · litho ~18% (hard ceiling) Names: NAURA (platform) · AMEC (etch, into 5nm TSMC qual) · Piotech (deposition) · Skyverse Catalysts: CXMT/YMTC ramp qual window + policy tailwinds; risk: tighter controls One-line order (by evidence grade, not target price): anchor ASML/TEL/Lam/AMAT/KLA/Advantest/Teradyne/FormFactor/Onto → elasticity overweight BESI/ASMPT/Hanmi/SEMES/DISCO/ACCRETECH → timing track Linde/Air Liquide/SK ecoplant/Samsung C&T/Exyte → thematic ACM/NAURA/AMEC → watchlist Piotech/Hwatsing/SMEE/local metrology Illustrative; model/est. figures are not official disclosure.

Three things not to write: don't write "memory capex = ASML/Lam/AMAT all benefit"; don't write HBM bonding/ATE/probe elasticity as unlimited certainty; don't write domestic substitution as global leading-edge substitution.


Chapter 3 — Tool by tool: the deep dive

Each section uses one template: what it is (physical intuition) → landscape & moat → how this cycle pulls it → tracking signals. Start the five front-end sections with this overview:
Front-End Process Loop: one DRAM wafer runs the "six-station loop" hundreds of times Advanced DRAM needs 60-80 litho layers × a full loop per layer → each step's share and intensity set the vendor's upside Memory front-end intensity anchor 1c DRAM: 5-6 EUV layers (SK hynix) 4F² / VG architecture → litho intensity steps up NAND 300 layers+ → deposition/etch superlinear 2025 WFE $115.7B (+11%) ① Lithography + Track "Projects" the circuit pattern onto the wafer resist ASML: EUV 100% monopoly · backlog €25-39B TEL: Track ~90% (EUV Track 100%) Memory elasticity: more EUV layers = structural add ② Etch (incl. HARC) "Carves" material away per pattern; NAND channel hole hardest Lam leads (Cryo 3.0 low-temp etch moat) TEL ~25% · AMAT (No.1 conductor etch) TAM $18-20B · NAND equip 2025 +45% ③ Deposition (CVD/ALD/PVD) "Plates" conductor/insulator films layer by layer AMAT leader (PVD >50%) · Lam · TEL ASMI: ALD specialist (share mid-50s%) TAM $25-28B · W→Mo shift adds new demand ④ CMP Planarization "Polishes" the surface flat before the next loop AMAT ~65% · Ebara ~25% (strong in memory) TSV reveal is the hardest CMP step in HBM TAM ~$4.1B · qualification lock 18-24 months ⑤ Clean / Thermal Particle/residue removal between steps + anneal activation Clean: SCREEN · TEL · ACM (~8% global) Thermal: highest domestic-substitution step (>60%) Step count scales linearly with process complexity ⑥ Metrology / Inspection Every loop needs a "check-up" to hold yield KLA ~63% (data flywheel: 15k tools × 30 yrs) Onto gaining share in HBM inspection ($240M deal) TAM $18B+ · "only segment with no strong substitute" Illustrative; model/est. figures are not official disclosure.

3.1 Lithography + Track: monopoly pricing power, structural memory upside

What it is: projecting the circuit pattern onto the resist (litho) plus the coat/develop that pairs with it (Track). Advanced DRAM needs 60-80 lithography layers — the most litho-intensive track in memory.

Landscape: ASML monopolizes EUV (100%), ~85% of all litho; the moat is source (Cymer) + Zeiss optics + ecosystem, a triple composite with a 12+ yr catch-up. TEL holds Track ~90% (EUV Track 100%), 30 years co-developed with ASML; the biggest far threat is Lam's dry resist (early stage).

How this cycle pulls it: ① DRAM node migration is the core — 1c EUV layers rise to 5-7 (Samsung trimmed from 8-9 for yield; SK at least 5-6), 4F²/VG architecture keeps lifting intensity; ② an ADR prospectus disclosed 11.9T KRW of EUV purchases (to 2030) — a rare company-level figure disclosed directly; ③ Micron on a multi-year ASML EUV supply deal (1-gamma ramping, 1-delta 2027H2); ④ NAND uses no EUV today (only possible above 400 layers), don't count NAND capex into ASML.

Tracking signals: ASML memory-order share; EUV tool allocation across P4/M15X/Yongin; High-NA validation progress in DRAM (post 2027-28).

3.2 Etch: HARC is the highest-value segment this cycle

What it is: carving material away by the litho pattern. NAND channel holes (HARC) must drill ~50:1 aspect-ratio holes through 200-332 stacked layers (heading toward 100:1) — like drilling a 1-meter-wide straight well down from the 10th floor.

3D NAND Physical Structure: Why "Layer Scaling" Mainly Drives Deposition and Etch Left: 3D NAND vertical cross-section (CBA architecture) Right: structure → tool (Illustrative, not to scale.) ⋮ ⋮ ⋮ (200-332 alternating films stacked) ⋮ ⋮ ⋮ Staircase contact (word lines routed per layer) Cu-Cu bond interface CMOS periphery circuit wafer (CBA: CMOS directly Bonded to Array) Channel hole (HARC) 5-6μm deep · ~100nm dia. Aspect ratio ~50:1 (>100:1 in the 1000-layer era) ≈ drilling a 1m-wide well straight down 10 storeys Structure → tool ① Alternating film stacking → deposition PECVD/ALD: Lam · AMAT · TEL 200→300+ layers ≈ +50% deposition steps NAND is the biggest deposition-tool driver ② Channel hole → HARC etch Lam Cryo 3.0 low-temp etch dominates (etch at -100°C, supports 400+ layers) ARDE effect: steps grow super-linearly with layers ③ Metallization: W → Mo Lam ALTUS Halo (industry-first production- grade Mo ALD, launched Feb 2025) ④ CBA architecture → wafer bonding CMOS and memory array bonded after separate build Bonding/alignment tools + bond-interface CMP ⑤ High aspect-ratio structure → metrology challenge Hole-bottom CD / sidewall profile hard to measure optically KLA e-beam · Onto · acoustic metrology Layer race (2026 status): Kioxia/SanDisk BiCS8 218L (K2 in production) → BiCS10 332L (2026H2) Samsung V9 286L · SK hynix 321L · YMTC Xtacking 4.0 ~270L (domestic tools >50%) Investment read: layer upgrades ≠ net-new WPM, yet deposition/etch demand still grows (conversion-type demand) Illustrative, not to scale.

Landscape: Lam leads NAND deep-silicon etch (cryo, -100°C, adopted in HVM by all leading makers, supports 400+ layers); TEL monopolizes DRAM capacitor etch and attacks NAND with -70°C cryo dielectric etch; AMAT is strong in conductor etch (+3pp to #1). TSV deep-silicon etch (DRIE): Lam is currently exclusive to the top makers, with AMAT/AMEC in validation — HBM volume makes TSV etch Lam's second growth curve.

How this cycle pulls it: NAND layers 218→332 make HARC steps grow super-linearly (ARDE); the DRAM 4F² transition adds high-aspect-ratio etch; TSV adds 15+ new sub-steps. The 2025 NAND-tool +45.4% is mostly etch + deposition.

Tracking signals: Lam NVM revenue (FY25 +2.5×); order cadence at K2/BiCS10, M17, Fab 10B; TEL cryo-etch share progress in NAND; AMEC 85:1 (already into a NAND maker's 232 layers) → 90:1 validation.

3.3 Deposition: biggest NAND-layer beneficiary + a material-transition increment

What it is: "plating" conductor/insulator films layer by layer (CVD/ALD/PVD). Every 3D-NAND layer needs deposition — 200→300+ layers means +50% deposition steps.

Landscape: AMAT overall leader (PVD >50% is the fortress); ASMI is the ALD specialist (single-wafer ALD mid-50s%, 9 straight years of double-digit growth); Lam/TEL split by film type; Kokusai/Wonik in furnaces. The W→Mo metallization transition is the new variable: Lam's first production-grade Mo ALD (2025.2), with AMAT slow to respond — the material-generation switch is reshaping deposition share.

How this cycle pulls it: NAND layers (biggest driver) + DRAM HKMG adoption + HBM front-end ALD intensity; the 2026-27 K2/BiCS10 conversion, M17, Fab 10B, and YMTC Phase III are all deposition order pools.

Tracking signals: ASMI memory-order share; Mo-ALD adoption at the big three NAND makers; Piotech (PECVD +75%) ramp on domestic lines.

3.4 CMP + Clean + Thermal: the invisible intensity amplifiers

What it is: the "planarize" (CMP), "wash" (clean), and "anneal" (thermal) between every cycle. Step count scales linearly with process complexity; HBM's TSV reveal is the hardest CMP step (TTV<5%, two-stage process).

Landscape: CMP: AMAT ~65% (Reflexion), Ebara ~25% (strong in memory oxide CMP) — 18-24 month qualification lock, hard to pry short-term; ASMI entered via Axus. Clean: SCREEN/TEL lead; ACM differentiates with megasonic (~8% global). Thermal: relatively low barrier, highest domestic localization (>60%, NAURA lead).

How this cycle pulls it: HBM hybrid bonding imposes new CMP requirements (Ra<0.5nm, copper dishing 2-5nm) — a 2027-28 increment; the advanced-DRAM yield war lifts clean/particle-control value.

Tracking signals: Ebara memory-CMP orders; Hwatsing (local CMP >90%, 1000th tool shipped) share at CXMT/YMTC; hybrid-bond-surface CMP tool selection.

3.5 Metrology / Inspection: the AI-era "yield-tax collector"

What it is: every cycle gets a "health check" — defect inspection, CD metrology, overlay. Memory has 40%+ more inspection steps than logic.

Landscape: KLA ~63%, moat is a flywheel of 15,000 installed tools × 30 years of defect data — "hardware copyable, data not" — the only WFE segment with no strong substitute. Onto is this cycle's clearest share-migration story: Dragonfly G5 (150nm defects, 5× throughput) won double-digit orders from a top HBM maker + a $240M multi-year agreement (to 2027) — forming a "dual supplier" setup vs KLA in HBM inspection, though the erosion is limited to HBM.

How this cycle pulls it: HBM's 4× wafer multiplier → inspection demand magnifies; TSV/microbumps introduce new defect types; high-aspect-ratio structures (NAND hole bottoms) spawn e-beam/acoustic metrology demand. This is the best mix of "certainty × elasticity."

Tracking signals: KLA memory-revenue share (~34%); Onto follow-on orders (whether it extends to a second HBM customer); domestic metrology validation (~25%, the weak point).

3.6 HBM mid-stream: TSV, temporary bonding, thinning & dicing

HBM Physical Cross-Section: Which Tool Each Structure Maps To Left: GPU + HBM package cross-section (CoWoS-class 2.5D) Right: structure → process → tool supplier (Illustrative, not to scale.) Package Substrate Si Interposer (TSMC CoWoS / Samsung I-Cube) GPU / xPU logic die (logic foundry, out of scope here) Base logic die (foundry process from HBM4) DRAM core die ×12 layers (HBM3E) → ×16 layers (HBM4) TSV 2-5μm dia Microbump HBM4; HBM5→hybrid Each die thinned to ~30-50μm (1/20 of a credit card's thickness) Structure → process → tool ① TSV formation & fill (front-end insert process) DRIE deep-Si etch: Lam (Cryo low-temp etch) Cu electroplate fill + anneal; ~15+ added sub-steps ② TSV Reveal + backside thinning CMP: AMAT (~65%) / Ebara (~25%), TTV<5% Thinning: DISCO (>70% share) TAIKO process ③ Stack bonding (tightest bottleneck today) TCB: Hanmi (MR-MUF) / ASMPT / BESI / SEMES ±1.5μm accuracy; HBM5 20-layer → hybrid bond ④ KGD test (16 layers = 16 known-good-die tests) Probe cards: FormFactor (DRAM probe cards +70% YoY) ATE: Advantest (T5593) / Teradyne (Magnum 7H) ⑤ Inspection & metrology Onto Dragonfly G5 (microbump/TSV defects, 150nm-class) KLA (general defect inspection, ~63% share) Core multiplier: 1GB HBM ≈ 4× standard DRAM wafer use Front-end uses more wafers (larger die + TSV area take + stack yield loss); back-end scales test/bond demand by layers → this is why "HBM drives tools far beyond its revenue share" Generational evolution: HBM3E 12 layers · microbump+TCB HBM4 (2026 ramp) 16 layers · still microbump HBM5 (2027-28) 20+ layers · hybrid bond Bonder count ∝ layers; test time HBM4 vs HBM3E +30-50%; hybrid-bond tool lead time 12-18 months, 2026-28 capacity locked by orders Illustrative, not to scale.

What it is: the difference between HBM and ordinary DRAM is "through-hole (TSV) — thin — stack." Dies must be thinned to 30-50μm (HBM4 era <30μm, 1/20 of a credit card's thickness), then 12-16 stacked.

Landscape & pull:

Tracking signals: DISCO shipments and lead time; EVG/SUSS orders; the mid-stream tool lists for Onyang's 5 new lines and P&T7.

3.7 Bonding (TCB → Hybrid): the most elastic, least-settled segment

HBM backend line: from "wafer with TSVs" to "sellable HBM" Backend adds no WPM but decides sellable HBM — the point of Samsung Cheonan/Onyang, SK Cheongju P&T7 and Micron Singapore AP expansions (1) TSV reveal (expose Cu) Backside grind to expose TSV Cu pillars Two-step CMP: fast grind then fine polish TTV<5% · "most challenging CMP" Tools: AMAT / Ebara (CMP) TEL (backside processing) (2) Thinning + dicing Grind to ~30-50um (near the limit) TAIKO process: keep 3mm outer rim Prevents ultra-thin wafer cracking Tools: DISCO (>70% monopoly) 70% GM, tool+consumable+service lock (3) KGD wafer test 16-layer stack = 16 KGD tests each +1 KGS test after stacking Test count doubles vs 8-layer Probe card: FormFactor (leader) SK hynix = 29.5% of its revenue (4) Stack bonding TCB *bottleneck Layer-by-layer heat+pressure microbump bond Accuracy +-1.5um · UPH>=120 TAM $0.76B->$1.6B (26E) Hanmi 71% (units) / ASMPT BESI (Micron-exclusive) / SEMES (Samsung in-house) (5) Molding / underfill NCF film (mainstream) vs MR-MUF (Hanmi/SK exclusive, 2x thermal, aids 12-layer+ cooling) Process route dictates tool choice (6) Package inspection Microbump/TSV defects at 150nm level Onto Dragonfly G5 throughput 5x Has taken share from incumbents Onto ($240M+ deal) / KLA (7) Final test ATE HBM4 per-unit test time +30-50% Backend test tools 2025 +48.1% (fastest of all tool segments) Advantest ~50% / Teradyne Software lock: millions of lines of test code ✓ Sellable HBM Stack Ships to NVIDIA / AMD / cloud -> enters CoWoS & other 2.5D packaging Customer qualification is the last gate: tool installed does not equal sellable — Samsung HBM's key lesson 2027-28 key variable: TCB -> hybrid bonding switch HBM4 still uses microbump + TCB (JEDEC thickness spec loosened to 775um to leave room for 16 layers); HBM5 (20 layers+) fully switches to Cu-Cu hybrid bonding, no microbumps. Three camps: BESI+AMAT alliance (AMAT holds 9%, has won ~100 tool orders) vs ASMPT independent path (AOR tech migrates across processes) vs Hanmi catching up (building line with TES). Investment read: generation switch = window where customer lock reshuffles. Hanmi's TCB share edge will not automatically carry over to hybrid bonding. Illustrative. Market shares are approximate.

What it is: bonding 12-16 dies layer by layer with heat and pressure (TCB); in the HBM5 era it shifts to direct copper-copper (hybrid bonding, no microbumps). The tightest HBM backend bottleneck today.

Landscape (four-way fight + in-house):

PlayerPositionLockKey variable
Hanmi~71% by units (unverified)SK mainstay; MR-MUF exclusive (2× thermal vs NCF)Exclusivity broken; patent fight with a rival
ASMPT2025 revenue +146%; 7 follow-on TCB tools placed by SK (~$3M each), ~100 more expected 2026.3SK's #2 supplier, confirmedAOR tech can migrate across processes into hybrid
BESIMicron HBM4 exclusive TCBAMAT 9% stake allianceCustomer concentration risk; ~100 hybrid orders won
SEMES/Hanwha/Shinkawa/ToraySamsung in-house + KR/JP second tierSamsung mostly self-supplySamsung's outsourcing ratio is the biggest variable

TCB market ~3× in 3 yrs ($0.46-0.76B → 2027 ~$1.5-1.6B, two ranges in App. B). Hybrid switches 2027-28 (HBM4 still uses microbumps, JEDEC thickness relaxed to 775μm to leave room for 16 layers; HBM5 fully switches): BESI+AMAT vs ASMPT standalone vs Hanmi+TES catching up — tool lead time 12-18 months, 2026-28 capacity already locked by orders.

Investment read: the process-generation switch = a customer-lock reshuffle. Hanmi's TCB share does not auto-migrate to hybrid; conversely, whoever wins the first HBM5 hybrid orders locks in 2028-30. Tracking signals: who wins the 2026.3 ~100-tool TCB order; Onyang's 5-line bonding selection (SEMES vs outsourced); BESI's hybrid orders from memory customers; MR-MUF vs NCF vs hybrid roadmap declarations.

3.8 The test chain: probe card, ATE, inspection — the invisible ceiling on "sellable HBM"

What it is: a 16-layer stack = 16 KGD tests per unit + 1 post-stack test; HBM4 single-die test time is +30-50% vs HBM3E; final test of an accelerator with 8 HBM stacks stretches from ~50s to 20+ min. If test can't keep up, nameplate capacity never becomes sellable supply.

Landscape:

How this cycle pulls it: backend test tools +48.1% in 2025 is the fastest of any segment — a direct map of HBM complexity, and the debate is whether it's a "short-term mismatch" or a "structural new normal" (each generation lengthens test time → per-unit test volume outgrows capacity expansion). We lean to the latter, using Advantest utilization as the falsifier.

Tracking signals: Advantest memory-tester revenue guidance (CY26 $2.2-2.7B); FormFactor Korea revenue; tester buys at P&T7 (WT line 2027.10) and Cheonan.

3.9 Facilities: time-lag arbitrage, reinforced this week

What it is: EPC, bulk/specialty gases, ultrapure water (UPW), power, AMHS (overhead transport), cleanroom — the first revenue wave of any greenfield, booked 6-12 months after groundbreak, leading WFE by 18-30 months.

Landscape: EPC market ~$47.2B (Exyte #1 at 10.3%; customer lock: Samsung C&T↔Samsung, SK ecoplant↔SK (Yongin GC), Bechtel↔N. America); gas duopoly Linde (project proof at a Korean fab) / Air Liquide (project proof at SK P&T7 and Micron Idaho); UPW Japanese top-3 (Kurita/Organo/Nomura) >80%; power ABB/Schneider; AMHS Daifuku/Murata.

How this cycle pulls it: this week stretched the far pipeline again — the Honam cluster needs 6.3GW power, 650k tons water/day (government promises up to 100% fiscal support); Yongin Fab1's 154kV backup + 345kV power and 2,312m tunnel are happening now; Micron FY27 construction capex is +$10B+ YoY. Note the non-standard disclosure and few pure-play names — more of a leading indicator than a direct holding pool.

Tracking signals: SK ecoplant Yongin progress (one cleanroom per 6 months); Exyte semiconductor order book; gas-company long-term-agreement announcements.

3.10 Domestic substitution: fast copy-and-scale at mature nodes, a fight at leading nodes

Two readings first: an adoption reading puts 2025 new-capacity localization at 35% (marginal speed); a penetration reading puts installed at 23.2% (2030E 39%). Both hold — incremental fast, installed low, overall still early.

SegmentLocalization (approx)Representative makers2025 key progress
Thermal>60%NAURAmass production at a mature node
Etch/deposition>40%AMEC/NAURA/PiotechAMEC revenue RMB 12.4B (+36.6%), 85:1 HARC into a NAND maker's 232 layers, 5nm into foundry validation; Piotech RMB 6.5B (+58.9%), PECVD +75%
CMPlocal >90%Hwatsing1000th tool shipped; core supplier to CXMT/YMTC
Clean~8% globalACMrevenue RMB 6.8B, GM 48.3%; megasonic differentiation, one of few with overseas share
Metrology~25% (another reading <15%)Skyverse/JingCefilm/CD breakthroughs, biggest gap in defect inspection
Lithography~18%SMEEconflicting reads (KrF vs DUV claims) — unverified, App. B

Drivers & constraints: policy requires new lines >50% domestic; the MATCH act (2026.4) bars immersion DUV + cryo etch to China — "sanction→forced substitution" is clearest in etch/deposition, but the litho/metrology ceiling means a domestic line can't build a standalone leading-edge process line. CXMT 2026 tenders (~RMB 35-43B, est.) and YMTC Phase III (>50% domestic) are the main order pools; NAURA (RMB 39.4B revenue, +30.9%, booked into 2027Q1) is the platform representative.

Tracking signals: CXMT tender win structure from Q2; YMTC core-step localization rate; control-list changes; validation progress of the domestic HBM chain (hybrid bonding etc).


Chapter 4 — Investment framework & tracking system

4.1 Allocation tiers (by evidence grade, not story size)

TierNamesLogicPositioning
Anchor · certaintyASML / TEL / Lam / AMAT / KLA / Advantest / Teradyne / FormFactor / Ontoproof-the-slope: totals + company financials cross-checkable; near-monopoly premium rises in the AI eraballast
Overweight · elasticityBESI / ASMPT / Hanmi / SEMES / DISCO / ACCRETECH / TechnoprobeHBM backend volume+price rising, but no primary customer-share evidence and generation switch reshuffleselasticity, validate order by order
Time-lag · trackLinde / Air Liquide / SK ecoplant / Samsung C&T / Exytefacilities lead 18-30 mo; this week Honam/Southwest stretched the pipeline to the 2030sleading indicator
Thematic · domesticACM / NAURA / AMEC (+ Piotech / Hwatsing watchlist)mature-node copy-and-scale + CXMT/YMTC validation window; litho/metrology ceilingthematic, watch policy

Note: this is a proof-tier ordering, not an expected-return ordering — the most certain segments are usually the most fully priced; excess return more likely appears at the moment "option-to-proof upgrades to proof" (e.g., Onto winning HBM orders, ASMPT confirmed as SK's #2).

4.2 Five milestone gates and the 2026-2028 tracking calendar

Five gates: construction → cleanroom readiness → tool move-in → first/pilot wafer → customer qualification. Which gate a project sits at decides which tools it pulls right now.

WindowKey events (catalyst calendar)
2026H2Samsung P4 Q4 mass ramp (1c/HBM4); P5 Fab2 groundbreak (~July); K2/BiCS10 mass production (H2); CXMT HBM3 target (year-end) + tenders landing; SK ADR listing (7/10); Micron FQ1'27 guide validating construction share; Cheonan TCB 231k/mo target (year-end)
2027Yongin Fab1 first cleanroom 2027.2 (single most important event: SK's WFE order window opens); the 2026.3 ~100-tool TCB order allocation revealed (a 2026 event shaping 2027); M15X reaches 50k wpm; Tongluo meaningful shipments (mid-year); Boise ID1 first wafer (mid-year); Singapore HBM AP ramps (H1); P&T7 WT line (Oct); Cheonan packaging done (Dec); M17 groundbreak; Micron next node volume (H2)
2028P5 Fab1 ops; P&T7 WLP line ramp (Feb); Indiana mass production (H2); Fab 10B output (H2); ID2 first wafer (year-end); first HBM5/hybrid orders; CXMT 500k checkpoint
2029-2030M17 output (2029H1); the model WPM's first reality check (2029); Yongin full-config path, Clay NY, first Honam projects

4.3 Falsifiers: a three-tier refutation system

Downgrade rule: any project that sits two consecutive quarters at construction/policy headlines with no cleanroom delivery / tool delivery / qualification signal → downgrade from near-term equipment beta to a long-dated option (closest to triggering now: Gwangju/Honam, CXMT Fab4, Southwest 400T).

4.4 Quarterly review template (seven evidence types)

Score seven evidence types each quarter to drive proof-tier up/downgrades: ① cleanroom opening (Yongin cadence is the gold sample); ② tool move-in (P4/M15X/Tongluo); ③ pilot/first wafer (ID1, Yongin 2027H2); ④ customer qualification (HBM4/4E, BiCS10, CXMT DDR5); ⑤ backend capacity (TCB tool count, tester count, packaging-fab completion); ⑥ capex split (construction vs equipment, Micron's quarterly disclosure is the best anchor); ⑦ confidence drift (whether modeled numbers diverge more from what lands officially).


Appendix

Appendix A — Definitions & glossary

Appendix B — Data-conflict log (check before citing)

#ConflictReading 1Reading 2Handling
1Samsung DRAM total todayrevised 720klocal-model sum 695k (2026E)use model for slope; note the reading when citing a total
2Samsung 2026 net addearlier market view 80-100krevised down ~15kuse 15k (the downgrade logic holds), tag est.
3P5 capacity"6k WPM"Fab1+2 combined ~600k, single fab 200-300k (this week's read)10× apart, unverified; text uses model 30→150k
4Chungcheong total392T310T (another version)use 392T, flag uncertain
5SK Wuxi WPM~200klocal model ~190ktreat as a range
6Yongin Fab1 investmentapproved construction 31T (9.4+21.6)"110T" reading (unconfirmable)use 31T; 600T is full-lifecycle
7P&T7 amount~19T7/2 new packaging reading 20Ttreat as a rolling upgrade of one project, use ~20T
8M15X rampearly 10k → year-end 55-60k40k → 80k (another reading); "50k/mo from 2027"use official anchor + "50k wpm from 2027"
91c EUV layersSamsung trimmed to 5-7SK ≥5-6; original plan 8-9cite with maker and timepoint
10ATE shareAdvantest ~50%66% (CY25 SoC basis)memory/SoC bases differ, write "~50-66% by measure"
11TCB market size$0.76B→$1.6B$0.46B→$1.5Bwrite "~3× in 3 yrs," give amount as a range
12SMEE litho level90nm KrF28nm DUV first tool delivereddirect contradiction, unverified; verify before citing
13ASML EUV backlog€38.8B (end-2025)€25.5Btimepoint/basis differ, cite explicitly
14Micron ID1"production 2027"official first wafer mid-CY2027use the official milestone wording
15Chungcheong HBM: Samsung 56TOnyang 5 lines reported this weekdetail at report-level onlytag official/reported mix, await company IR confirmation

Appendix C — Figure index

The 13 figures in this report (all self-authored schematic/framework figures; any capacity numbers tagged "model" are estimates): fig_weekly_delta (this week's delta), fig_global_map (global map), fig_kr_map (Korea corridor), fig_fab_timeline (project Gantt), fig_wpm_bridge (capacity bridge), fig_capex_flow (transmission framework), fig_five_lines (five pull lines), fig_equipment_matrix (segment positioning), fig_moat_tiers (three-tier pyramid), fig_frontend_loop (front-end loop), fig_nand_structure (3D NAND structure), fig_hbm_stack (HBM cross-section), fig_hbm_backend_flow (HBM backend line).